JPH0539625Y2 - - Google Patents
Info
- Publication number
- JPH0539625Y2 JPH0539625Y2 JP18624786U JP18624786U JPH0539625Y2 JP H0539625 Y2 JPH0539625 Y2 JP H0539625Y2 JP 18624786 U JP18624786 U JP 18624786U JP 18624786 U JP18624786 U JP 18624786U JP H0539625 Y2 JPH0539625 Y2 JP H0539625Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- furnace body
- pressure
- intermediate chamber
- intermediate cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010453 quartz Substances 0.000 claims description 91
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 91
- 239000004065 semiconductor Substances 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624786U JPH0539625Y2 (en]) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624786U JPH0539625Y2 (en]) | 1986-12-03 | 1986-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6390827U JPS6390827U (en]) | 1988-06-13 |
| JPH0539625Y2 true JPH0539625Y2 (en]) | 1993-10-07 |
Family
ID=31135629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18624786U Expired - Lifetime JPH0539625Y2 (en]) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539625Y2 (en]) |
-
1986
- 1986-12-03 JP JP18624786U patent/JPH0539625Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6390827U (en]) | 1988-06-13 |
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